Event Info Thin films are found in many technologically important devices as an integrated component serving various functions. They typically have a thickness in the range of 10 nm to 1000 nm, strong preferred orientation, and different levels of crystallinity. All these characteristics makes it challenging to study the structure and property of thin film by conventional XRD scan with Bragg-Brentanno geometry (BBG). For this reason, X-ray analysis of thin films require a different diffractometer set-up and data collection method. This short course will introduce some of the most widely available X-ray scattering and diffraction methods to study thin film materials, such as XRR, GIXRD, analysis of textured films, and high-resolution XRD scans.
Speaker:
Dr Pio Buenconsejo Senior Research Fellow, FACTS, NTU Singapore Registration for this event has closed. |